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工業技術研究院

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技術名稱: 石英材料/元件微加工製程技術

技術簡介

以微機電技術製作之石英微元件/音叉式/震盪器,達到晶向控制佳,開發腐蝕速率較快且成本低的製程技術。

Abstract

none

技術規格

雙面高精度對準 (對位誤差≦±5um),石英材料精密深蝕刻 (外型控制≦±5um)

Technical Specification

none

技術特色

製程穩定\晶圓級批次生產\大量製造\可搭配晶圓級測試及封裝\價格便宜

應用範圍

石英共振之元件, 可用於電波時鐘及DSC,PMP,Mobile Phone之產品中

接受技術者具備基礎建議(設備)

化學槽、塗佈機、曝光機、顯影機‘.

接受技術者具備基礎建議(專業)

材料、化工、機械

技術分類 無機材料

聯絡資訊

聯絡人:徐政富 電子材料及元件研究組

電話:03-5915326 或 Email:JF_Shu@itri.org.tw

客服專線:+886-800-45-8899

傳真:03-5820386

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