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工業技術研究院

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技術名稱: 奈米電性量測技術

技術簡介

於FIB/SEM系統中對微/奈米尺度待測目標進行高空間解析之定點電性量測與元件操作測試。

Abstract

Performing site-specific high-spatial-resolution electrical measurements and device operation tests of micro-/nano-scaled samples with FIB/SEM.

技術規格

四點或兩點量測,下針定位精度高於30nm

Technical Specification

two-probe or fou-probe measurement, probing precision is better than 30 nm

技術特色

高空間解析度定點電性分析

應用範圍

半導體元件故障分析、材料電性值分析

接受技術者具備基礎建議(設備)

FIB/SEM、微操控器、sourcemeter

接受技術者具備基礎建議(專業)

材料、物理、化學、化工

技術分類 材料分析

聯絡資訊

聯絡人:羅聖全 前瞻材料基磐技術組

電話:+886-3-5915296 或 Email:alexsclo@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5910086

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