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工業技術研究院

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技術名稱: GaN on Si 磊晶及元件技術

技術簡介

本技術包含GaN on Si之磊晶及元件技術,Si基板尺寸可達6吋,可應用於發光二極體及功率元件。以大面積、高導熱Si基板降低成本並提高光電元件效能。

Abstract

The technologies include the epitaxy and device for GaN on Si. Si substrate is 6 inch wafer. The applications focus on LED and power device. The large size and high thermal dissipation of Si substrate can reduce the cost and improve performance.

技術規格

6吋GaN on Si,(1)藍光LED:λ=430nm~480nm,厚度>4um,氮化鎵XRC半寬(002)~400arcsec,(102)~470arcsec。 (2)AlGaN/GaN HEMT元件: electron mobility > 1000 cm2 V-1 s-1,sheet carrier density > 1 x 1013 cm-2,Breakdown voltage >800V,D-mode and E-mode製程。

Technical Specification

6-in GaN on Si wafer,(1)blue LED:λ=430nm~480nm, epi-film thickness > 4um, GaN XRC (002)~400arcsec, XRC (102)~470 arcsec. (2)AlGaN/GaN HEMT device: electron mobility > 1000 cm2 V-1 s-1,sheet carrier density > 1 x 1013 cm-2,Breakdown voltage >800V,D-mode and E-mode advanced processes。

技術特色

(1)以AlGaN超晶格緩衝層結構成長高品質GaN on Si薄膜 (2)以nano-rod結構製作normally-off HEMT元件技術。

應用範圍

(1)LED:交通號誌、交通照明燈具、全彩化顯示幕、照明用。(2)HEMT:電力及車用電子、無線通訊的高頻功率放大器等產業。

接受技術者具備基礎建議(設備)

需有磊晶成長技術或光電製程相關經驗之半導體廠商。

接受技術者具備基礎建議(專業)

需有磊晶成長技術或光電製程相關經驗之半導體廠商。

技術分類 光電元件

聯絡資訊

聯絡人:張弘文 光電元件與系統應用組

電話:+886-3-5918018 或 Email:hwchang@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5915138

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]