『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: 光學即時監控系統

技術簡介

開發MOCVD光學即時監控系統,可即時監控磊晶時候腔體環境。

Abstract

The in situ monitor system can measure the MOCVD chamber ambient during epitaxy.

技術規格

三波長光源監控系統,可即時監控長速、溫度、曲率。

Technical Specification

In situ monitor system includes three wavelengths to detect the growth rate, temperature and curvature.

技術特色

國產設備,可擴充功能。

應用範圍

MOCVD磊晶技術

接受技術者具備基礎建議(設備)

需有磊晶成長技術或光電製程相關經驗之半導體廠商。

接受技術者具備基礎建議(專業)

需有磊晶成長技術或光電製程相關經驗之半導體廠商。

技術分類 光電元件

聯絡資訊

聯絡人:張弘文 光電元件與系統應用組

電話:+886-3-5918018 或 Email:hwchang@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5915138

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]