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工業技術研究院

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技術名稱: 平面基板狹縫塗佈設備技術

技術簡介

完成精密狹縫塗佈設備開發,該設備用於平面基板溼式塗膜製程,其塗膜範圍、厚度、均勻度皆可精準控制。可支援狹縫塗佈模具客製化設計,已驗證包括光阻、導電高分子、硬化塗層、表面改質塗層、光學膠、漿料等塗料。

Abstract

Precision slit coater has been well developed which is used for wet coating process on flat substrate. Coating range, thickness and uniformity can be well controlled. Customization of slit nozzle design is supported. Verified coating materials include photoresist, conductive polymer, hard coating, surface treatment coating, optical clear resin, slurry and so on.

技術規格

基板尺寸:370mm x 470mm, 膜厚範圍:0.2μm ~ 200μm, 膜厚變異量:±3% (最佳值), 最大塗速:10m/min

Technical Specification

Sub. Size: 370mm x 470mm, Thickness: 0.2μm ~ 200μm, Thickness variation: ±3% (best), Coating speed: 10m/min

技術特色

完成精密狹縫塗佈設備開發,該設備用於平面基板高均勻度溼式塗佈製程。本製程設備採用預計量式塗佈方式,封閉供料系統,可節省塗料及保持塗料品質,故獲得高品質塗膜成品。

應用範圍

舉凡須在平面基板完成高品質塗膜之製程,皆可適用,包括平面顯示器製程、觸控面板製程、背光模組、透明導電基板,太陽能製程等產業。

接受技術者具備基礎建議(設備)

同步運動控制技術、高精度運動控制技術

接受技術者具備基礎建議(專業)

精密機械設計人才、電控設計人才、化學化工人才

技術分類 光電與半導體製程設備

聯絡資訊

聯絡人:謝志瑋 先進製造核心技術組

電話:13904 或 Email:cwhsieh@itri.org.tw

客服專線:+886-800-45-8899

傳真:03-5820043

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]