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工業技術研究院

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技術名稱: 多氟碳化物分解觸媒

技術簡介

開發分解PFC氣體之觸媒,觸媒對於各PFC氣體(C2F6、CF4、NF3及SF6)之去除率皆大於95%。

Abstract

We synthesized over 80 kinds of catalyst and proceed delete efficiency rate (DER) test with C2F6, CF4, NF3 and SF6.The DERs are over 95% for each PFC gases.

技術規格

在PFC濃度500ppm,GHSV(h-1)=500,O2=5 mol%,H2O=2.7~3 mol%,N2=balance,的條件下,觸媒之分解效率為100%,並可耐久1000小時以上

Technical Specification

The catalytic efficiency kept 100% at least of 1000 hr as the PFC concentration is 500ppm,GHSV (h-1)=500, O2=5 mol%, H2O=2.7~3 mol% and N2=balance.

技術特色

導入尾氣處理程序之概念,開發之專利觸媒組成及反應程序可去除PFC分解所產生之HF,使其不至於腐蝕後段設備並提高PFC氣體處理系統的熱效益。

應用範圍

所有使用PFC氣體半導體廠之尾氣處理

接受技術者具備基礎建議(設備)

具有廢氣處理經驗及具有電機設備組裝經驗

接受技術者具備基礎建議(專業)

具化學、化工或材料背景

技術分類 無機材料

聯絡資訊

聯絡人:李秋煌 化學工程技術組

電話:+886-3-5732394 或 Email:leechiou@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5732346

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