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工業技術研究院

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技術名稱: 低電壓次原子解析電鏡服務

技術簡介

減少電子束敏感型材料 (碳基或高分子基) 於分析過程中所產生的輻射損傷,並提供其結構與性質之分析。

Abstract

Reduce radiation damage of e-beam sensitive material (Carbon-based and Polymer-based) during analyzing and provide structure/chemical properties information.

技術規格

1. 操作電壓 : 60/ 80 / 120kV、2. 影像空間解析能力 ? 136pm、3. 能量解析能力 ? 0.5eV

Technical Specification

1. Acceleration voltage: 60/80/120kV、2. Image spatial resolution ? 136pm、3. Energy resolution ? 0.5eV

技術特色

1. 減少電子束輻射損傷保持待測材料原貌、2. 藉電子平均自由徑增加之特性增強影像對比以及微量元素探測能力

應用範圍

電子束敏感型材料檢測,微量元素探測

接受技術者具備基礎建議(設備)

電子顯微鏡基礎原理與相關操作經驗

接受技術者具備基礎建議(專業)

材料、物理、工科相關科系

技術分類 材料分析

聯絡資訊

聯絡人:羅聖全 前瞻材料基磐技術組

電話:+886-3-5915296 或 Email:alexsclo@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5910086

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