工業技術研究院

技術簡介

本技術利用大尺度自動追蹤雷射干涉儀(Laster)做為量測儀器，該儀器是以一個兩軸旋轉治具做為載具，以雷射干涉儀或光梳絕對測距儀做為測距元件，兩軸旋轉治具可帶動量測元件進行追蹤及測距，測距是以一高精密度的圓球球心做為量測參考點，球面做為光反射面，目的在於減少兩軸旋轉治具組裝及幾何誤差所造成的影響，量測不確定度為0.5 um + 1 um/m*L，可符合產業需求。絕對測距可解決傳統積分型式雷射干涉儀量測過程光線不可中斷的問題。透過多線交會(multilateration)的量測技術與數學模型的建立，可進行多軸工具機空間精度檢測，利用蒙地卡羅法可以進行量測不確定度的評估。

Abstract

This technology is based on a large scale auto-tracking laser interferometer (Laster). The structure consists of a two-axis rotation mount and a distance measuring device (it can be a laser interferometer or a comb based absolute distance measurement device). The distance measuring device is setting on the two-axis rotation mount. Thus, the measuring device can perform tracking and measurement task. The distance between the reflector and the measurement device is based on an ultra-high precise sphere. The center of the sphere is the measurement reference point and the sphere surface is the reflection surface for decreasing measurement accuracy due to mechanism assembly error and the error motion of the bearings. Measurement uncertainty of Laster is 0.5 um + 1 um/m*L. It‘s very suitable for being applied on error motion measurement for high precision machines like machine centers. The comb based absolute distance measurement device solves the problem that the laser beam cannot be interrupted during the measurement using traditional integration type of laser interferometer. Using the multilateration measurement technology and building the mathematic model, spatial accuracy measurement for multi-axis machine tools can be performed. The measurement uncertainty is estimated by means of Monte-Carlo Method.

技術規格

量測不確定度為0.5 um + 1 um/m*L，量測範圍為400 mm至10 m

Technical Specification

Measurement uncertainty is about 0.5 um + 1 um/m*L and the measurable range is between 400 mm to 10 m

技術特色

同技術簡介

應用範圍

多軸工具機定位與幾何誤差量測、機械手臂誤差量測、精密機械定位與幾何誤差量測

接受技術者具備基礎建議（設備）

工具機、雷射干涉儀

接受技術者具備基礎建議（專業）

ISO GUM量測不確定度評估、工具機幾何誤差量測(根據ISO 230-1/-2/-6)，工具機誤差補償

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