『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: 微奈米形貌光學量測技術

技術簡介

(1) 半導體晶圓Bump Height/CD/Roughness量測技術、顯示器Photo-Spacer/Color Filter形貌量測技術: 我們發展白光干涉術及3D形貌重現演算軟體,可應用在圖案化樣品高度(< 3 um)及CD量測,及樣品表面粗度量測 (Ra < 3 um)。 (2) 晶圓Warpage/Bow及Total Thickness Variation量測技術、光電半導體厚膜量測技術: 我們發展條紋反射形貌輪廓術及彩色共焦形貌輪廓術,可應用在12吋晶圓翹曲(<=1 mm)及厚度(< 700 um)量測,與樣品厚膜量測(< 700 um)。

Abstract

(1) Semiconductor Wafer Bump Height/CD/Roughness Measurement Technology, Display Photo-Spacer/Color Filter Profile Measurement Technology: We develop White Light Interferometry and related 3D profiles reconstruct software. Patterned sample height (< 3 um), CD, and sample surface roughness (Ra < 3 um) can be measured. (2) Wafer Warpage/Bow and Total Thickness Variation Measurement Technology, Optoelectronic Semiconductor Thickness Film Measurement Technology: We develop Fringe Reflection Profilometry and Chromatic Confocal Profilometry. The bow/ warpage (<= 1mm) and thickness (< 700 um) of 12 inch wafer, and sample thickness film (< 700 um) can be measured.

技術規格

(1)圖案化樣品高度(< 3 um)及CD量測; (2)12吋晶圓翹曲(<=1 mm)及厚度(< 700 um)量測

Technical Specification

(1) Patterned sample height (< 3 um) and CD can be measured; (2)The bow/ warpage (<= 1mm) and thickness (<700 um) of 12 inch wafer can be measured

技術特色

同技術簡介

應用範圍

1.半導體晶圓Bump Height/CD量測設備 2.顯示器Photo-Spacer高度量測設備 3.顯示器Color Filter形貌量測設備 4.晶圓全域Warpage/Bow及TTV量測設備 5.光電半導體厚膜量測設備

接受技術者具備基礎建議(設備)

具半導體及光電產業的光學檢測設備開發基礎

接受技術者具備基礎建議(專業)

光電半導體自動化設備技術; 光學檢測模組整合應用技術

技術分類 先進檢測與感測儀器- 檢測/設備技術

聯絡資訊

聯絡人:王浩偉 量測技術發展中心

電話:+886-3-5732181 或 Email:hwwang@itri.org.tw

客服專線:+886-800-45-8899

傳真:none

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]