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工業技術研究院

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技術名稱: 表面分析之微區能譜應用技術

技術簡介

運用場發射式歐傑電子顯微鏡(FE-AES)及微區表面化學電子能譜儀(μ-ESCA/XPS)協助表面成分與鍵結分析。

Abstract

Utilizing Field-emission Auger electron spectroscopy (FE-AES) and Micro-Electron spectroscopy chemical analysis (u-ESCA) for composition and bondind analysis.

技術規格

XPS化態分析功能(AnalyserΔE<25meV),縱深解析度1nm;AES化態分析功能(Energy resolution ~0.05%),縱深解析度1nm,成份影像解析度12nm

Technical Specification

XPS composition (AnalyserΔE<25meV),depth profiling resolution ~1nm;AES composition(Energy resolution ~0.05%),depth profiling resolution ~1nm,composition image resolution 12nm

技術特色

小於10奈米影像解析度、低能離子縱深分析、高解析之化態分析、絕緣材質分析等。

應用範圍

精密元件表面汙染、斷面分析、故障分析等。

接受技術者具備基礎建議(設備)

各式材料開發、半導體生產製造者

接受技術者具備基礎建議(專業)

高分子、化工、材料

技術分類 材料分析

聯絡資訊

聯絡人:鄭信民 前瞻材料基磐技術組

電話:+886-3-5918277 或 Email:SMCheng@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5830569

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