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工業技術研究院

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技術名稱: 微氣體感測器

技術簡介

本技術主要應用微機電製程製作氣體感測器之加熱器、溫度感測器及氣體感測電極。其原理利用加熱器控溫至作動溫度,因偵測氣體與感測材料反應,致使電阻產生變化,而使電極偵測得知氣體成分為何。並可利用微機電(MEMS)技術和互補式金氧半導體積體電路(CMOS IC)技術在未來將兩者整合為一感測系統。

Abstract

ERSO/ITRI is developing Micro Gas Sensor integrated with micro heater, temperature detector and sensing electrodes by MEMS technology. When the toxic gases have been detected, the sensor resistance will reduce directly by Pt or Au electrodes sensing. The micro gas sensor is with low power consumption performance during detecting gas. This technology will integrate the MEMS and COMOS IC to be the intelligent gas sensing system, and apply to detect the toxic or hazard gas such as CO, CO2, H2S, and O2.

技術規格

項目Item /規格Specification Chip Material:Silicon Process :Bulk Machining Electrode Material: Pt Driving Voltage

Technical Specification

Item/Specification Chip Material: Silicon Process: Bulk Machining Electrode Material:Pt Driving Voltage

技術特色

應用微機電製程製作氣體感測器。

應用範圍

此產品可應用於感測有毒害氣體濃度,如一氧化碳、硫化氫、氧氣、瓦斯氣等。

接受技術者具備基礎建議(設備)

微機電製程及半導體設備。

接受技術者具備基礎建議(專業)

化工,機械背景及半導體製程人才。

技術分類 產品

聯絡資訊

聯絡人:陳國彰 智慧微系統科技中心

電話:+886-6-3847136 或 Email:kerwin_c@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-6-3847294

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