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工業技術研究院

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技術名稱: 電化學蝕刻停止技術

技術簡介

電化學蝕刻停止技術是為以電化學濕蝕刻方式製作精確的懸膜厚度結構。

Abstract

This technology utilizing electrochemical can precisely control the thickness of free standing thin film.

技術規格

懸膜厚度尺寸變化在±1μm。

Technical Specification

Etching variation < +- 1um

技術特色

濕法微細加工。

應用範圍

以濕蝕刻方式製作精確的懸膜厚度結構時,最常用到,如壓力感測器、加速度計與微流量感測器等。

接受技術者具備基礎建議(設備)

半導體相關設備。

接受技術者具備基礎建議(專業)

半導體、材料、物理及電子等相關背景。

技術分類 製程

聯絡資訊

聯絡人:陳國彰 智慧微系統科技中心

電話:+886-6-3847136 或 Email:kerwin_c@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-6-3847294

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