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工業技術研究院

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技術名稱: 光纖陣列晶片之V- groove精確蝕刻技術

技術簡介

利用KOH非等向性濕蝕刻技術,得到光纖陣所需之V型凹槽結構,並配合精確對準光罩之應用,有效控制側蝕量,應用於光纖陣列晶圓製程技術。

Abstract

Lising KOH anisotropic wet etching technique to obtain the V-shape structure of fiber array.This technique apply precrision alignment to control undercut effective.

技術規格

4、8、16、32、48- channels fiber arrays fiber to fiber spacing : 250+-1um

Technical Specification

4、8、16、32、48- channels fiber arrays fiber to fiber spacing : 250+-1um

技術特色

應用微機電 (MEMS)的方法,不但精確度高,且可大量生產。  

應用範圍

用於光纖通訊應用載具之相關產品。

接受技術者具備基礎建議(設備)

微機電製程及半導體設備。

接受技術者具備基礎建議(專業)

MEMS或IC製程,化工或,機械背景人才。

技術分類 製程

聯絡資訊

聯絡人:陳國彰 智慧微系統科技中心

電話:+886-6-3847136 或 Email:kerwin_c@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-6-3847294

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