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工業技術研究院

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技術名稱: 雙軸微加速度計元件技術

技術簡介

本技術之發展在於雙軸加速度計之感測單元設計、製造、晶圓測試、讀取電路、封裝、與產品試驗證,以達到小尺寸、低功耗、可整合基本信號處理的產品功能。

Abstract

Dual axis lateral accelerometer technology raedy for technology transfer, this packaged technology includes proven sensing element design, fabrication, wafer testing, engineering packaging, readout circuit, and eveluation plan.

技術規格

Range : +/-2g Package Size : 25mm3 解析度 : 2mg (BW=100Hz) 功率消耗 < 5mW

Technical Specification

Resolution : 2mg (BW=100Hz) Power Consumption < 5mW

技術特色

兩軸獨立設計具靈敏度高與它軸靈敏度低之優點。

應用範圍

消費性電子產品,如: 手機、硬碟、遊戲機。

接受技術者具備基礎建議(設備)

元件設計模擬軟體工具。

接受技術者具備基礎建議(專業)

電子電路、半導體製程、微機電、機械相關背景。

技術分類 微機電元件

聯絡資訊

聯絡人:陳國彰 智慧微系統科技中心

電話:06-3847136 或 Email:kerwin_c@itri.org.tw

客服專線:+886-800-45-8899

傳真:06-3847294

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