『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: 模組化大氣線型電漿源技術

技術簡介

建構寬幅線型大氣電漿源技術,開發乾式電漿於半導體或光電產業之先進表面鍍膜技術與表面改質技術,取代傳統真空製程技術與濕式前處理製程,提高材料表面之功能性應用或異質材料接著物之附著性

Abstract

none

技術規格

1.線型電漿源模組,幅寬以10公分為單位,幅寬可達100公分 2.可做為表面清潔、噴塗前處理系統,有效提升異質接合程度 3.功能性鍍膜技術(碳基、矽基),表面能可調(接觸角20~90度)

Technical Specification

none

技術特色

建構寬幅線型大氣電漿源技術,開發乾式電漿於半導體或光電產業之先進表面鍍膜技術與表面改質技術,取代傳統真空製程技術與濕式前處理製程,提高材料表面之功能性應用或異質材料接著物之附著性

應用範圍

半導體、光電產業、面版、紡織業、食品包裝業、汽車業LED封裝產業

接受技術者具備基礎建議(設備)

移載平台、氣體供應系統、尾氣排放系統、大氣電漿系統

接受技術者具備基礎建議(專業)

化學、機械、電漿技術

技術分類 精密機械

聯絡資訊

聯絡人:翁志強 先進製造核心技術組

電話:+886-3-5918795 或 Email:PeterWeng@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820043

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]