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工業技術研究院

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技術名稱: 150mm光罩傳送盒

技術簡介

SMIF(Standard Mechanical Interface)介面光罩傳送盒,係一密封隔離的潔淨容器,提供光罩片進出各種俱標準化機械介面之半導體製程設備及輸送系統,或儲放於一潔淨環境時,避免置放於其中的光罩片遭受微小塵粒(Particles)的污染,達到控制微小塵粒污染的目的。 150mm光罩傳送盒符合SEMI標準的規範,多重ESD防護,並且具有良好的共通性與相容性,可以符合半導體業者的使用需求。

Abstract

SMIF interfaced reticle pod is used as a clean container to provide controlled environment to semiconductor manufacturers by protecting reticles from particle contamination during handling, storage and transport. The 150mm SMIF Reticle Pod is designed in accordance with the SEMI Standards. Maintain a "better-than-Class 1" reticles environment, ESD protection and interoperability with automation.

技術規格

符合SEMI標準 內裝一片6吋光罩 ESD防護設計 低有機氣體分子釋出 潔淨度Class 1或更佳 可靠度高 MCBF>50,000 cycles

Technical Specification

Conforms to the SEMI standards. One reticle capacity ESD protection Low outgassing Better than Class 1 environment MCBF>50,000 cycles

技術特色

一體化設計 可靠度高,節省成本,組裝及維護簡單且容易清洗 符合客戶化需求設計

應用範圍

150mm及300mm晶圓廠使用 潔淨容器設備開發

接受技術者具備基礎建議(設備)

具備有具高潔淨度生產環境

接受技術者具備基礎建議(專業)

具高潔淨度要求晶圓容器設計及應用概念。

技術分類 光電與半導體製程設備

聯絡資訊

聯絡人:吳宗明 雷射中心

電話:+886-6-6939168 或 Email:TMWu@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-6-6939056

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