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工業技術研究院

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技術名稱: 300 mm晶圓傳送盒技術

技術簡介

在300mm的晶圓廠中,晶圓傳送盒扮演著晶圓載卸、傳送及儲放功能,同時提供晶圓高潔淨度之置放環境,以確保製程中之晶圓不受微塵粒子污染。 目前,300 mm晶圓傳送盒技術仍在持續發展中。因應SEMI標準的更新與客戶化的使用需求,朝向高潔淨度、高可靠度與成本降低等趨勢發展。

Abstract

FOUPs are used to load/unload, transport and store 300 mm wafers in an IC manufacturing process. They also provide the 300 mm wafers in a high clean mini-environment to assure the wafers will not be contaminated in the manufacturing processes. Because of the upgrades of SEMI standards and the new requirements of users, the 300 mm FOUP Technology is evolving toward more stringent demands of high cleanliness, high reliability, and low cost.

技術規格

符合SEMI標準。 內裝25片12吋晶圓。 ESD防護設計。 低有機氣體分子釋出。 潔淨度:Class 1或更佳。 可靠度MCBF>50,000 cycles。

Technical Specification

Conforms to the SEMI standards. 25 wafer capacity. ESD protection. Low Outgassing. Better than class 1 wafer environment. MCBF>50,000 cycles.

技術特色

可靠度高,節省成本,組裝及維護容易,易清洗。 符合客戶化需求設計。

應用範圍

300mm晶圓廠潔淨晶圓容器開發

接受技術者具備基礎建議(設備)

具高潔淨度生產環境

接受技術者具備基礎建議(專業)

具高潔淨度要求晶圓容器設計及應用概念

技術分類 光電與半導體製程設備

聯絡資訊

聯絡人:吳宗明 雷射中心

電話:+886-6-6939168 或 Email:TMWu@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-6-6939056

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]