『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: 300mm晶圓載入機、傳送盒技術

技術簡介

在300mm的晶圓廠中,晶圓載入機與晶圓傳送盒是晶圓載御時不可或缺的介面設備,晶圓傳送盒更扮演著晶圓傳送及儲存功能,同時提供晶圓高潔淨度之置放環境,以確保製程中之晶圓不受微塵粒子污染。

Abstract

In 300 mm Semiconductor manufacturing fabs., Load port and FOUP are standard mechanical interface essential for loading/unloading wafers in/out process equipment, in addition, FOUP also provides a better than class 1 wafer transportation and storage environment for securing the wafer from contaminating during the entire manufacturing process.

技術規格

符合SEMI標準。 潔淨度:Class 1或更佳。 ESD防護設計。 低有機氣體釋出。 MCBF>100,000 cycles。 具SECS I/II通訊功能。

Technical Specification

Conforms to the SEMI Standards; Better than class 1 wafer environment; MCBF>100,000 cycles; ESD protection; Low outgassing; SECS I/II communication protocol

技術特色

包含SMIF I/O Port及Wafer carrier技術。 符合客戶化需求設計。

應用範圍

300mm晶圓廠、無塵室設備開發。

接受技術者具備基礎建議(設備)

具高潔淨度生產環境。

接受技術者具備基礎建議(專業)

具高潔淨度要求機械設備設計概念。

技術分類 光電與半導體製程設備

聯絡資訊

聯絡人:吳宗明 雷射中心

電話:06-6939168 或 Email:TMWu@itri.org.tw

客服專線:+886-800-45-8899

傳真:06-6939056

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]