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工業技術研究院

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技術名稱: 6吋半導體晶圓盒

技術簡介

6吋半導體晶圓盒為一密封隔離潔淨容器,以提供晶圓片(Wafer)進出各式標準化機械式介面(Standard Mechanical InterFace;SMIF)之半導體製程系統輸送過程中,或儲放於一潔淨環境時,避免晶舟及置放於其中的晶圓片遭受微小塵粒(Particles)的污染,達到控制微小塵粒污染的目的。

Abstract

The 150mm SMIF pod is designed in accordance with the SEMI Standards. Providing a better than class 1 environment to semiconductor manufacturers by protecting wafers from particle contamination during handling, storage and transport in semiconductor manufacture processes.

技術規格

符合SEMI標準 內裝25片6吋晶圓 底盤ESD抗靜電材質 低有機氣體分子釋出 潔淨度維持Class 1或更佳 MCBF>50,000 cycles

Technical Specification

Conforms to the SEMI standards 25 wafer capacity Conductive door significantly reduces likelihood of ESD damage Low outgassing Better than Class 1 wafer environment. MCBF>50,000 cycles

技術特色

一體化晶圓盒蓋設計,易清洗、易烘乾、節省成本、組裝與維護容易

應用範圍

150mm半導體晶圓廠

接受技術者具備基礎建議(設備)

具高潔淨度生產環境者

接受技術者具備基礎建議(專業)

具高潔淨度要求之機械(設備)設計概念者

技術分類 光電與半導體製程設備

聯絡資訊

聯絡人:吳宗明 雷射中心

電話:06-6939168 或 Email:TMWu@itri.org.tw

客服專線:+886-800-45-8899

傳真:06-6939056

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