『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: 半導體隔離應用技術

技術簡介

1. 符合SEMI標準。 2. 模組化簡潔設計。 3. 壓接或卡接組裝方式,無金屬零件。 4. 靜電防護設計。 5. 低有機物質釋出材料。

Abstract

1. Conforms to SEMI standards. 2. Modular and compact design. 3. Snap fit without metal components. 4. ESD protection. 5. Low outgassing.

技術規格

符合SEMI標準; 潔淨等級Class 1或更佳; 表面阻抗≦10^5 Ohms/sq; MCBF>25,000次。

Technical Specification

Conforms to SEMI standards; Cleanliness: Class 1 or better; Surface Resistance≦10^5 Ohms/sq; MCBF>25,000.

技術特色

提供晶圓廠中光罩儲存傳送及載入機台更物美價廉的解決方案

應用範圍

6吋光罩盒

接受技術者具備基礎建議(設備)

半導體相關設備

接受技術者具備基礎建議(專業)

半導體設備相關背景

技術分類 光電與半導體製程設備

聯絡資訊

聯絡人:吳宗明 雷射中心

電話:(06)6939168 或 Email:TMWu@itri.org.tw

客服專線:+886-800-45-8899

傳真:06-6939056

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]