『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: 線型表面特性量測技術

技術簡介

開發線型量測模組,並可一次量測拋光墊的粗糙度資訊,達到可判斷再修整/銳化指標。

Abstract

none

技術規格

(1)量測深度解析<0.5 μm (2)量測深度>400 μm (3)工作距離>10 mm

Technical Specification

none

技術特色

開發線型量測模組,並可一次量測拋光墊的粗糙度資訊,達到可判斷再修整/銳化指標。

應用範圍

半導體拋光墊表面特性

接受技術者具備基礎建議(設備)

線型彩色共焦探頭

接受技術者具備基礎建議(專業)

光學量測

技術分類 先進檢測與感測儀器- 檢測/設備技術

聯絡資訊

聯絡人:卓嘉弘 量測技術發展中心

電話:03-5743187 或 Email:Gabo_Cho@itri.org.tw

客服專線:+886-800-45-8899

傳真:none

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]