『您的瀏覽器不支援JavaScript功能,若網頁功能無法正常使用時,請開啟瀏覽器JavaScript狀態』

跳到主要內容區塊

工業技術研究院

:::

技術名稱: 前瞻製程關鍵粒子即時監控技術

技術簡介

半導體製程使用溶液之線上粒子尺寸與濃度監控技術,此技術大幅超越目前使用的光學偵測方式極限40 nm,達到5 nm等級,提供發展中的最先進半導體7 nm、5 nm等製程需。

Abstract

A new generation monitoring system of nanoparticles in solution, based on aerosol particles measurement technology, monitoring range from 5 nm to 1000 nm

技術規格

監控範圍 5 nm to 1000 nm

Technical Specification

monitoring range 5 nm to 1000 nm

技術特色

氣膠粒子量測技術,可達5奈米,不受氣泡干擾

應用範圍

半導體、光電及生醫領域溶液中顆粒檢測。

接受技術者具備基礎建議(設備)

none

接受技術者具備基礎建議(專業)

none

技術分類 先進檢測與感測儀器- 檢測/設備技術

聯絡資訊

聯絡人:傅尉恩 量測技術發展中心

電話:03-5732220 或 Email:WeienFu@itri.org.tw

客服專線:+886-800-45-8899

傳真:none

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]