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工業技術研究院

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技術名稱: 狹縫塗佈智慧化模組技術

技術簡介

完成即時膜厚量測技術,減少缺陷產生,提高精密狹縫塗佈設備的可靠度。此設備採用龍門移動式設計,強化製程可靠度。

Abstract

The real-time film thickness measurement technology is completed to reduce defects and improve the reliability of precision slit coating equipment. This equipment uses the gantry mobile design, enhances the process reliability.

技術規格

基板尺寸: 370mm x 470mm 膜厚範圍:0.2μm~200μm 最佳膜厚均勻度:±3% 最大塗速:10m/min 膜厚量測範圍: 50 nm-20 um

Technical Specification

Sub. Size: 370mm x 470mm, Thickness: 0.2μm ~ 200μm, Thickness variation: ±3% (best), Coating speed: 10m/min Film thickness measured range: 50 nm-20 um

技術特色

完成即時膜厚測量模組開發,即時獲得膜厚資訊藉以調整和控制,避免缺陷產生。

應用範圍

舉凡須在平面基板完成高品質塗膜之製程並欲進行智慧化目的和製程控制者,皆可適用,包括平面顯示器製程、觸控面板製程、背光模組、透明導電基板等功能性材料塗膜,和太陽能製程等產業

接受技術者具備基礎建議(設備)

即時膜厚測量模組、高速同步運動控制模組、高精度運動模組、供料模組、塗佈模具

接受技術者具備基礎建議(專業)

精密機械設計人才、電控設計人才、化學化工人才

技術分類 精密機械

聯絡資訊

聯絡人:鄭貴元 先進製造技術組(0M000)

電話:+886-3-5913867 或 Email:jaffer_cheng@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-3-5820252

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]