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工業技術研究院

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技術名稱: 非線性製程效能感知技術

技術簡介

業界多由現場人員憑經驗判斷製程效能,然其製程過程中不能任意中斷,且其檢測成本高,而其感測訊號具非線性相關時間序列且形態變化多,不易決策。故本技術建立可彈性動態取樣建構區域模型,用以精準預測製程品質關鍵影響因子更長遠的未來時間之變化趨勢及目標值,以輔助現場人員防患於未然。

Abstract

Frequent monitoring in both tool and process is required to detect the quality issue early so as to improve the process stability of continuous manufacturing. However, more tool and process monitoring means more metrology operation cost and longer cycle time and the process signal is non-linear interaction and multiform. Therefore, we developed an dynamic learning modeling with local model sampling to predict the process perofrmance and to help the domain user as early as possible make decision to improve the manufacturing quality.

技術規格

.非線性製程效能感知模組(效能感知誤差(MAPE)≦15%) .預測時間長度 ≧ 5個時間單位

Technical Specification

.Mean Absolute Percentage Error(MAPE) of Performance Awareness Methods ≦15% .Predition of duration ≧ 5 time units

技術特色

發展最適區域匹配及非線性迴歸演算法可改善劇烈轉折點之預測誤差,並依預測時間目標可彈性動態取樣,結合訊號變化率轉換預測值及多步提前預測演算方法,其預測時間長度 ≧ 5個時間單位,並可降低效能感知誤差(MAPE)於15%以內。

應用範圍

提供製造現場製程效能預測,例如化工業合成樹脂製程酸度及黏稠度預測、鋼鐵業氣體儲槽液位預測、材料業特化陶瓷材料製程特性預測等應用。

接受技術者具備基礎建議(設備)

建議運行環境:CPU:1.2GHz+多核心 RAM:32G+ Disk:40G+ OS:Windows7 Matlab 2013+ Runtime環境

接受技術者具備基礎建議(專業)

資工相關背景

技術分類 資訊

聯絡資訊

聯絡人:潘佩琪 技術推廣組

電話:47097 或 Email:peggypan@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-6-3847182

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