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工業技術研究院

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技術名稱: Parylene功能性薄膜披覆技術

技術簡介

客製化開發聚對二甲苯披覆設備,包括智動化控制蒸鍍源模組、大面積擴散流場均勻化模組、及異質材料表面改質技術,相較於業界領先產速提升6倍,可應用於矽膠基材披覆及電路板絕緣披覆。

Abstract

The customized parylene coating equipment is developed for product function, including intelligent control evaporation source module、flow field uniformity module、and heterogeneous material surface modification. The throughput is 6 times faster than industry leaders, which can be applied to silicone substrate coating, and circuit board insulation coating.

技術規格

生產速率:0.5μm/40min 腔體可用空間:ITRI設備85%@直徑1200mm x 高度1200mm腔體 鍍膜重現性:≧95% 前處理改質:15min

Technical Specification

none

技術特色

工研院雷射中心自主開發Parylene(聚對二甲苯)鍍膜設備,定量智動化控制蒸鍍源模組,及大面積高速擴散流場設計,相較於業界領先其產速提升6倍,流場均勻重現性提升25%,提供客製化整機鍍膜設備輸出終端客戶,及功能性鍍膜代工服務,Parylene薄膜高絕緣特性、防水耐化特性及Conformal披覆性可運用於半導體光電精微領域。

應用範圍

矽膠基材耐化、電路板絕緣、電子元件防水

接受技術者具備基礎建議(設備)

加熱模組 Dry Pump 壓力計 真空閥件 PLC模組

接受技術者具備基礎建議(專業)

機械、電控、製程

技術分類 機械與系統

聯絡資訊

聯絡人:廖經理 L200

電話:+886-6-6939109 或 Email:artliao@itri.org.tw

客服專線:+886-800-45-8899

傳真:none

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]