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工業技術研究院

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技術名稱: 感測器製程技術與服務

技術簡介

以產業化研發/試量產環境為營運主軸,建置微感測器材料、結構、製程特性之整合模擬測試系統,提供工業感測器、物聯網相關、光學檢測等感測器製作所需之專業技術服務,藉試量產實驗室之運作,加速微感測器產業之發展,創造全新感知運用產業價值鏈。

Abstract

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技術規格

■ 薄膜感測器研發試量產平台;低應力複合薄膜沈積技術 (stress< 15Mpa) ■ 慣性元件研發試量產平台:矽深蝕刻技術(< 1 deg. @>400um)、Anodic boding technology 、Non notch dry etch (roughness< 50nm)

Technical Specification

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技術特色

以研發、快速試製與小量生產為定位,提供微型感測器不同階段所需製程之解決方案,利基型產品可藉由本平台量產出貨;量大之產品亦可協助導入國內大型代工廠量產。

應用範圍

‘MEMS Microphone、Accelerometer / Vibration sensor、Gas sensor

接受技術者具備基礎建議(設備)

模組化、機電整合

接受技術者具備基礎建議(專業)

微機電元件、光學元件、醫材、感測器元件設計

技術分類 製程

聯絡資訊

聯絡人:陳國彰 智慧微系統科技中心

電話:47136 或 Email:kerwin_c@itri.org.tw

客服專線:+886-800-45-8899

傳真:none

[{"text":"企業網","weight":13.0},{"text":"材化所","weight":11.5},{"text":"機械所","weight":10.0},{"text":"綠能所","weight":9.4},{"text":"生醫所","weight":8.0},{"text":"半導體","weight":6.2},{"text":"南分院","weight":5.0},{"text":"太陽能","weight":5.0},{"text":"課程","weight":5.0},{"text":"遠紅外線","weight":5.0},{"text":"雷射","weight":4.0},{"text":"LED","weight":4.0},{"text":"LED可見光","weight":3.0},{"text":"5G","weight":3.0},{"text":"工研人","weight":3.0},{"text":"電光所","weight":3.0},{"text":"綠能與環境研究所","weight":3.0},{"text":"機械","weight":3.0},{"text":"資通所","weight":2.0},{"text":"面板","weight":2.0},{"text":"文字轉語音","weight":2.0},{"text":"實習","weight":2.0},{"text":"無人機","weight":2.0},{"text":"生醫","weight":2.0},{"text":"3D","weight":2.0},{"text":"v2x","weight":2.0},{"text":"員工","weight":2.0},{"text":"地圖","weight":2.0},{"text":"太陽光電","weight":2.0},{"text":"材料與化工研究所","weight":1.0}]