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工業技術研究院

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技術名稱: 環境感知系統晶片

技術簡介

透過創新之MEMS疊層感測器製程平台,開發專利之多功能環境感測器, 整合壓力、溫度、濕度、氣體感測器陣列於單一晶片,採均溫高絕熱之微加熱器設計,提升系統之電熱轉換效能並優化感測靈敏度,同時研發專利之自我補償校正演算法,修正壓力、濕度及氣體感測濃度。結合氣體感測陣列與機器學習,辨識室內環境異味,提供即時資訊與警示。

Abstract

none

技術規格

■壓力偵測範圍:30-110 kPa ■溫度偵測範圍:-40-85°C ■濕度偵測範圍:5%-95%RH ■CO濃度偵測範圍:0.1-200ppm ■TVOC濃度偵測範圍:0-3000ppb

Technical Specification

none

技術特色

整合抗熱應力高均溫MEMS微型加熱器、感測材料及加載技術、專利之可程式溫控及感測電路晶片,可應用於智慧居家及個人裝置。

應用範圍

個人穿戴及智慧家庭應用、多功能環境感測晶片、環境安全監測應用

接受技術者具備基礎建議(設備)

MEMS元件設計與IC設計模擬軟體工具,以及氣體、溫度、濕度、壓力測試設備等

接受技術者具備基礎建議(專業)

IC設計、半導體製程、微機電、機械相關背景。

技術分類 光學元件及系統技術

聯絡資訊

聯絡人:陳國彰 智慧微系統科技中心

電話:47136 或 Email:kerwin_c@itri.org.tw

客服專線:+886-800-45-8899

傳真:none

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