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工業技術研究院

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技術名稱: 微型多軸振動感測技術

技術簡介

工研院開發之振動感測器,感測器元件採用 MEMS 技術設計/製作,具備 2kHz 感測頻寬,數位式資料輸出,IP68 等級之金屬封裝等工業應用特點。應用上,整合時域/頻域訊號整合分析系統, 與振動訊號估測演算法之後端分析工具,提供客戶監控工具機設備在加工過程中所產生 的振動,以提升加工穩定度、精度並增加設備之使用效率。

Abstract

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技術規格

■Operation Temperature: –20°C to +85°C ■Shock Limit: 10,000 g ■Bandwidth: DC~ 2kHz,Noise < 50ug/rtHz

Technical Specification

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技術特色

具專利性結構設計與類比前端讀取電路與數位濾波校正電路,結合IP68等級之防水/塵/油污金屬封裝,可滿足眾多工業應用之導入。

應用範圍

可應用於主軸、滾珠螺桿、滑軌、工具機、高階CNC、鑽孔機、多軸機器人等設備之振動偵測。

接受技術者具備基礎建議(設備)

元件與電路設計模擬軟體工具。

接受技術者具備基礎建議(專業)

半導體、材料、物理及電子等相關背景

技術分類 微機電元件

聯絡資訊

聯絡人:陳國彰 智慧微系統科技中心

電話:47136 或 Email:kerwin_c@itri.org.tw

客服專線:+886-800-45-8899

傳真:none

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