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工業技術研究院

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技術名稱: 射頻電源功率放大模組技術

技術簡介

功率放大器模組技術可應用於電容性負載,如真空電漿激發,應用於電漿表面改質或清潔製程

Abstract

This power amplifer can be used for capacitive loading, such as plasma ignition for the surface modification or cleaning.

技術規格

1. 功率輸出:max 1KW 2. 頻率: 20Khz~250Khz

Technical Specification

1. 功率輸出:max 1KW 2. 頻率: 20Khz~250Khz

技術特色

全橋式MOSFET併聯技術,搭配DSP控制,可以輸出高頻交流訊號,驅動電容性負載

應用範圍

真空電漿、大氣電漿之相關設備

接受技術者具備基礎建議(設備)

示波器、功率量測器、訊號產生器

接受技術者具備基礎建議(專業)

電機、控制

技術分類 機械與系統

聯絡資訊

聯絡人:林東穎 L200

電話:+886-6-6939203 或 Email:lin0805@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-6-6939056

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