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工業技術研究院

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技術名稱: 雷射長波長轉換改質光路模組技術

技術簡介

透過工業界常見的1064 nm超快雷射導入非線性晶體(NLC)中,產生比入射波長要長的超快雷射,可針對非透明材料如(Si, SiC)進行內部改質

Abstract

Direct the OPA technology with nonlinear crystal to convert 1064 nm short pulse laser to 1550 nm laser

技術規格

"輸入波長:1064 nm 輸出波長:signal 1500~1600 nm idler 3100~3500 nm 轉換效率:30% "

Technical Specification

"輸入波長:1064 nm 輸出波長:signal 1500~1600 nm idler 3100~3500 nm 轉換效率:30% "

技術特色

透過國內自行研發的非線性晶體進行長波長轉換,可針對非透明材料如(Si, SiC)進行內部改質

應用範圍

矽晶圓內部改質與切割

接受技術者具備基礎建議(設備)

短脈衝(ns等級)雷射源

接受技術者具備基礎建議(專業)

光學、雷射製程、機械、控制

技術分類 機械與系統

聯絡資訊

聯絡人:吳秉翰 M100

電話:+886-6-6939143 或 Email:wupinghan@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-6-6939059

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