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工業技術研究院

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技術名稱: 雷射矩形孔鑽孔技術

技術簡介

搭配超快雷射與掃描繞孔策略進行矩形孔鑽孔,有效解決現有雷射製程在鑽孔過程中所產生的熱影響區與變形問題。製程中可搭配同軸視覺模組進行孔型觀測。

Abstract

Combine ultrafast laser and Laser scan drilling strategies to develop the rectangular hole drilling process. Because the cold machining property of ultrafast laser, the heat affected zone around the edge of the hole is below 2 μm. During the process, the coaxial vision system can be used to monitor the hole edge dimension and appearance.

技術規格

1. 矩形孔徑: 20~ 40 um 2. 孔型R角: ? 5 um 3. 孔型邊緣熱影響區:? 2 um 4. 加工厚度: ? 200 um

Technical Specification

1. 矩形孔徑: 20~ 40 um 2. 孔型R角: ? 5 um 3. 孔型邊緣熱影響區:? 2 um 4. 加工厚度: ? 200 um

技術特色

透過超快雷射的冷加工特性進行異型鑽孔,可有效降低孔形邊緣的熱影響區,製程中,可透過同軸視覺進行孔型觀測。

應用範圍

金屬噴嘴、封裝測試基板、玻璃鑽孔

接受技術者具備基礎建議(設備)

超快雷射源(<20 ps)

接受技術者具備基礎建議(專業)

光學、製程、材料、機械、光機電整合

技術分類 機械與系統

聯絡資訊

聯絡人:王淑儀 M100

電話:+886-6-6939170 或 Email:shokugi@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-6-6939059

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