工業技術研究院

技術簡介

主動式五軸磁浮軸承驅控技術，對驅動、控制、感測電路單元實現韌體整合。其中磁浮主軸偏心力抑制技術使用並聯式帶阻濾波器(parallel-mode notch filter)，快速追蹤並濾除主軸轉速頻率成分，抑制磁浮系統振動，縮小電磁線圈控制電流，留下電流裕度供極端工況或喘振情況使用。此技術亦透過靈敏度相位補償加快帶阻濾波器收斂速度，良好的相位補償可使加入並聯式帶阻濾波器後的磁浮軸承控制系統於各種負載下仍保持穩定。所發展之磁浮系統負載測試時符合ISO-14839-2國際振動規範。磁浮主軸懸浮後為非接觸式、軸承無磨耗、無需潤滑油，乾淨無雜質的優點可廣泛應用在半導體、高純度、生物科技、奈米流體或食品等相關特殊液體輸送。

Abstract

Active five-axis magnetic bearing drive and control technology, which realizes firmware integration for drive, control, and sensing circuit units. The eccentric force suppression technology of the maglev spindle uses a parallel-mode notch filter to quickly track and filter out the rotating speed frequency components of the spindle, suppress the vibration of the maglev system, reduce the coil control current, and leave the current margin for extremes or surge situations. This technology also speeds up the convergence speed of the notch filter through sensitivity phase compensation. A good phase compensation can make the magnetic bearing control system added with the parallel-mode notch filter remain stable under various loads. The developed maglev system complies with the ISO-14839-2 international vibration specification during load test. After the maglev spindle is suspended, it is non-contact, bearing no wear and no lubricating oil. The advantages of being clean and free of impurities can be widely used in specific liquid transportation, such as semiconductor, high purity, biotechnology, Nano fluid or food.

技術規格

額定功率：420W；額定輸入電源：DC140V；電流輸出通道數：10ch；額定輸出電流(每通道)：3A(連續)、6A(峰值)；類比數位轉換(ADC)通道數：32通道；類比數位轉換(ADC)解析度：12bits；類比數位轉換(ADC)電壓範圍：0~3V；人機介面SCI通訊baud rate：750,000。FFT頻譜分析範圍:0~300Hz(機械頻率)；磁控系統動態剛性鑑別範圍:1~1kHz(機械頻率)；磁控系統靈敏度鑑別範圍:1~1kHz(機械頻率)；偏心力抑制運作範圍:250Hz~620Hz(電氣頻率)。

Technical Specification

Rated power: 420W; Rated input power: DC140V; Number of current output channels: 10ch; Rated output current (per channel): 3A (continuous), 6A (peak value); Analog to digital conversion (ADC) channel number: 32 channels; Analog to digital conversion (ADC) resolution: 12bits; Analog to digital conversion (ADC) voltage range: 0~3V; Human-machine interface SCI communication baud rate: 750,000. FFT spectrum analysis range: 0~300Hz(mechanical frequency); Maglev spindle control system dynamic stiffness identification range(mechanical frequency): 1~1kHz; Maglev spindle control system sensitivity identification range: 1~1kHz(mechanical frequency); Eccentric force suppression operating range: 250Hz~620Hz (electrical frequency).

技術特色

1.非接觸式、無機械摩擦、無油化。 2.高精度電感型位置感測與多軸同步控制。 3.磁控系統廣頻率範圍動態特性鑑別。 4.可變頻率帶阻濾波器主軸偏心力抑制。 5.高速人機介面通訊、監測與數據分析。

應用範圍

應用五軸磁浮軸承控制之半導體、高純度、生物科技、奈米流體或食品等相關特殊液體輸送。

接受技術者具備基礎建議（設備）

須兼備馬達和磁浮軸承技術基礎。

接受技術者具備基礎建議（專業）

須具備馬達專業並有磁浮軸承開發之實務基礎。

聯絡資訊