工業技術研究院

技術簡介

主動式五軸磁浮軸承驅控技術，對驅動、控制、感測電路單元實現韌體整合。其中磁浮主軸增益排程控制技術透過外部靜態隨機存取記憶體(SRAM)進行控制器增益儲存與分配，並藉由規劃控制參數的切換斜率達到平順的增益改變。經過規劃之磁浮軸承驅控器可在不同頻率段均發揮良好性能，達到更低的振動值，且所有負載測試符合ISO-14839-2國際振動規範。磁浮主軸懸浮後為非接觸式、軸承無磨耗、無需潤滑油，乾淨無雜質的優點可廣泛應用在半導體、高純度、生物科技、奈米流體或食品等相關特殊液體輸送。

Abstract

Active five-axis magnetic bearing drive and control technology, which realizes firmware integration for drive, control, and sensing circuit units. The maglev spindle gain scheduling control technology uses external static random access memory(SRAM) to store and distribute the controller gain, and achieve smooth gain changes by planning the switching slope of the control parameters. The planned magnetic bearing controller can perform well in different frequency ranges and reach lower vibration values, and all loading tests complies with ISO-14839-2 international vibration standards. After the maglev spindle is suspended, it is non-contact, bearing no wear and no lubricating oil. The advantages of being clean and free of impurities can be widely used in specific liquid transportation, such as semiconductor, high purity, biotechnology, Nano fluid or food.

技術規格

額定功率：420W；額定輸入電源：DC140V；電流輸出通道數：10ch；額定輸出電流(每通道)：3A(連續)、6A(峰值)；類比數位轉換(ADC)通道數：32通道；類比數位轉換(ADC)解析度：12bits；類比數位轉換(ADC)電壓範圍：0~3V；人機介面SCI通訊baud rate：750,000；FFT頻譜分析範圍:0~300Hz(機械頻率)；控制器增益規劃範圍: 0~620Hz(電氣頻率)。

Technical Specification

Rated power: 420W; Rated input power: DC140V; Number of current output channels: 10ch; Rated output current (per channel): 3A (continuous), 6A (peak value); Analog to digital conversion (ADC) channel number: 32 channels; Analog to digital conversion (ADC) resolution: 12bits; Analog to digital conversion (ADC) voltage range: 0~3V; Human-machine interface SCI communication baud rate: 750,000; FFT spectrum analysis range: 0~300Hz(mechanical frequency); Controller gain scheduling range: 0~600Hz(electrical frequency).

技術特色

1.非接觸式、無機械摩擦、無油化。 2.高精度電感型位置感測與多軸同步控制。 3.不同操作頻率段控制器調校與切換。 4.高速人機介面通訊、監測與數據分析。

應用範圍

應用五軸磁浮軸承控制之半導體、高純度、生物科技、奈米流體或食品等相關特殊液體輸送。

接受技術者具備基礎建議（設備）

須兼備馬達和磁浮軸承技術基礎。

接受技術者具備基礎建議（專業）

須具備馬達專業並有磁浮軸承開發之實務基礎。

聯絡資訊