工業技術研究院

技術簡介

雙面高效率太陽電池技術開發，內容包括元件結構模擬與元件製程開發。模擬以將TOPCon技術應用於電池正、背兩面，以現有製程可達之最佳參數結合鈍化接觸電極時，元件Voc超過730 mV，理論效率達到25％以上。製程上，藉由調整N及P型多晶矽摻雜濃度與厚度，優化共燒結溫度後半成品iVoc可達726 mV，J0=8.1 mA/cm2，存活期=3,462 μs。同時，藉由分析不同金屬遮蔽率之電池計算出電極與正面P型多晶矽之鈍化接觸J0c為134 fA/cm2；最後，以無匯流排(busbarless)電極圖案搭配細線化技術，電極的線寬由45 μm降低為30 μm，並使用網格接觸量測方式(grid-touch contacting measurment)來進行電性分析，電池效率可達23.5％。

Abstract

This report including device simulation and process development. The simulation is based on the application of TOPCon technology to front and rear sides of the solar cell. When the bifacial solar cell with feasible parameters, in current process, the Voc exceeds 730 mV and the theoretical efficiency reaches over 25％. By adjusting the doping concentration and thickness of N and P-type polysilicon, the semi-finished product with optimized co-firing temperature can be achieve the iVoc of 726 mV, J0=8.1 mA/cm2, and lifetime=3,462 μs. Also, the J0c of 134 fA/cm2 between the electrode and the front P-type polysilicon was calculated by analyzing cells with different metal shielding ratios. Finally, with the busbarless electrode pattern and the fine-linearization technique (finger width is reduced from 45 μm to 30 μm), the cell efficiency with 23.5％ was obtained by grid-touch contacting measurement.

技術規格

1.以TOPCon技術應用於電池正、背兩面，模擬出Voc 732mV及效率25.1％的雙面高效率太陽電池。 2. 80 nm氮化矽/1.2nm氧化矽/120nm N型多晶矽/1.2 nm氧化矽/20nm P型多晶矽/80 nm氮化矽對稱結構之iVoc可達726 mV，J0=8.1 mA/cm2，存活期=3,462 μs。3. 雙面高效率電池元件Voc超過700mV，效率為23.5％。

Technical Specification

1.Base on the simulation of solar cell with feasible parameters, the Voc exceeds 730 mV and the theoretical efficiency reaches over 25％. 2.According to SiOx 1.2nm, n-poly Si 120nm, p-poly Si 20nm and SiNx 80nm, iVoc reach to 726 mV, J0=8.1 mA/cm2, lifetime=3,462 μs . 3. 4.Voc of high efficiency bifacial solar cells exceeded 700mV and efficiency reached 23.5％.

技術特色

1.內容包含完整的太陽電池製程整合。 2.技術可應用於PERx及TOPCon等鈍化改良太陽能電池，以及未來Tandem堆疊型電池之矽基下電池。 3.結構及理論計算可以作n型太陽能電池及p型太陽能電池。

應用範圍

光電、半導體，能源等相關產業

接受技術者具備基礎建議（設備）

太陽能電池製造廠及相關製程設備廠

接受技術者具備基礎建議（專業）

太陽光電電池原理及製程知識

聯絡資訊