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工業技術研究院

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工業技術與資訊月刊

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低溫大氣壓電漿鍍膜 降低成本兼顧環保

陶曉嫚

以往光電產業中最關鍵的「金屬氧化物材料」(metal-oxide)鍍膜製程,必須在真空、高溫500度以上且劇毒的環境進行,難以兼顧環保與成本。現在工研院開發的「低溫大氣壓電漿鍍膜」技術,在大氣環境下,只需使用空氣與含金屬離子的水溶液,就可在數分鐘內完成透明導電薄膜(TCO)的鍍膜!

這項研發從2005年開始到2011年底,機械所先進製造核心技術組電漿應用技術部經理張加強拿著結合「龍捲風」和「閃電」原理的鍍膜噴嘴,對技術的安全性有百分之百的信心。他回憶這項技術最大的瓶頸,就是尋找適合大量生產電漿的超合金材料,「我們花了一半的時間在嘗試最適合的超合金,期間特別與軍用品廠商合作。」

這項技術可廣泛應用於平板電腦、觸控面板、太陽能等產業,不但從設計、原料、製程到設備都符合環保的要求,是全球唯一的綠色製造技術(ECO Technology),還能將面板生產成本壓到現有製程的20至33%間。

「更令人興奮的是,這套設備在德國牙醫器具展時被德國Linde公司相中,將跨足雷射牙齒美白殺菌的生醫領域!」張加強說,今年3月已與Linde簽約正式授權,期望這項技術除了嘉惠產業,也能為民眾健康盡一份心力。

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