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工業技術研究院

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技術名稱: 探針卡雷射清潔技術

技術簡介

雷射清潔技術是透過雷射達成高價探針卡之清潔,以本團隊研發之雷射系統,達成探針卡雷射清潔。

Abstract

Laser cleaning technology is to achieve high-priced probe card cleaning through laser, and the laser system developed by the team to achieve probe card laser cleaning.

技術規格

Beam shape (Fit to Top-Hat)≧ 85% Pulse Energy Difference≦ 5%

Technical Specification

Beam shape (Fit to Top-Hat)≧ 85% Pulse Energy Difference≦ 5%

技術特色

已完成雷射清潔系統開發,包含雷射、光路設計、機構、電控、軟體、製程等,可進行各類探針卡之雷射清潔測試,提供業者完整解決方案。

應用範圍

1.Probe Card 2.Socket

接受技術者具備基礎建議(設備)

高能雷射源,線性平台

接受技術者具備基礎建議(專業)

光學、製程、材料、機械、光機電整合

技術分類 機械與系統

聯絡資訊

聯絡人:陳峻明 L100

電話:+886-6-6939145 或 Email:chunmin0205@itri.org.tw

客服專線:+886-800-45-8899

傳真:+886-6-6939056

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