- Power Module Pilot Line
ITRI’s power module pilot Line supports power module design and development, small-volume fabrication, and reliability validation
- Optoelectronic Semiconductor Fabrication Laboratory
As a pilot-scale optoelectronic semiconductor laboratory, the facility offers comprehensive III-V semiconductor platforms, including GaN epitaxy and device fabrication, as well as GaAs/InP device processing
- Silicon Photonics Validation Laboratory
The Silicon Photonics Measurement Laboratory provides an advanced integrated optoelectronic component and system measurement platform with industry-leading testing capabilities
- Optoelectronic Co-Packaging and Micro LED Pilot Manufacturing Laboratory
ITRI has established a high-standard Class 10 cleanroom laboratory capable of high-precision, high-resolution, and full-color Micro LED fabrication
- Quantum Computer System Laboratory
The Quantum Computer Systems Laboratory provides advanced characterization, technology transfer, and turnkey consulting services to plan and deploy cryogenic measurement facilities
- Sub-THz System Laboratory
The Sub-THz Systems Laboratory is a comprehensive high-frequency characterization facility covering LF, RF, microwave, millimeter-wave (mmWave), and frequencies above 100 GHz
- Nanotechnology Laboratory
The Nanoelectronics Laboratory offers state-of-the-art cleanroom facilities and an 8-inch back-end-of-line (BEOL) co-development and manufacturing platform for industrial partners
- Intelligent Value-Added Software Development Laboratory
The Laboratory develops an intelligent software standard platform and related intelligent software applications
- Advanced Machine Tool Measurement Laboratory
The Laboratory provides advanced measurement infrastructure for high-end machine tools in Taiwan, encompassing double-laser error compensation for gantry five-axis structures, an IBS five-axis dynamic accuracy calibrator, and BallBar dynamic accuracy measurement — enabling rapid whole-machine error assessment and compensation
- Smart Sensor Process Integration Laboratory
The Laboratory aims to integrate smart sensor process technology resources, elevate the overall level of domestic micro-sensor technology, and provide comprehensive technical services to industry — from prototype development and trial production through to volume manufacturing