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Industrial Technology Research Institute

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Center for Measurement Standards

Advanced Inspection and Metrology Technologies for Semiconductor Manufacturing
Advanced Inspection and Metrology Technologies for Semiconductor Manufacturing

Advanced Inspection and Metrology Technologies provide precision measurement solutions for semiconductor manufacturing, including particle standards, DAF and wafer thickness measurement, and 3D profile inspection...

Semiconductor Nanoparticle Impurities Inspection Technology
Semiconductor Nanoparticle Impurities Inspection Technology

Semiconductor Nanoparticle Impurities Inspection Technology detects trace particles in process chemicals and wafer materials...

Middle-to-Large-Molecule Uremic Toxin Detection Technology
Middle-to-Large-Molecule Uremic Toxin Detection Technology

While hemodialysis sustains the lives of patients with end-stage renal disease, conventional methods are limited in removing middle-to-large molecular uremic toxins, leaving patients at high risk of complications...

Standardized Air Pollution Forensic Mapping Framework
Standardized Air Pollution Forensic Mapping Framework

Air pollution governance in Taiwan faces challenges from fragmented data and reliance on manual judgment...

Smart Water & Gas Meter Verification Laboratories
Smart Water & Gas Meter Verification Laboratories

The use of smart meters to collect, transmit, and monitor utility measurement data has replaced manual meter reading...

Electric Vehicle for Rail Profile Measurement and Defect Inspection
Electric Vehicle for Rail Profile Measurement and Defect Inspection

Reliable rail systems are the foundation of train operation safety...

High-Resolution X-Ray CT Imaging Equipment and Calibration Technology
High-Resolution X-Ray CT Imaging Equipment and Calibration Technology

Current X-ray CT imaging systems suffer issues such as focal spot drift, which can affect inspection results...

GHG Emission Inventory Verification
GHG Emission Inventory Verification

Corporations are urged to set schedules and targets for carbon reduction...

Smart Utility Meter Verification System
Smart Utility Meter Verification System

To establish regulations for high-accuracy and high-compatibility utility meter test and verification, ITRI has developed a smart utility meter verification system according to international standards, providing a complete perception layer for smart city infrastructure...

Energy Storage System Safety Certification and EV Charging Validation
Energy Storage System Safety Certification and EV Charging Validation

Renewable energy (RE) and electric vehicles (EVs) are two key elements in achieving the goal of net zero emissions by 2050...