Technology Overview
Fluorine Polymer Real-Time Monitoring System.
In semiconductor cleanrooms, the leak of fluorine-containing organic molecular coolants from equipment may decrease the yield rate. ITRI has developed a fluorine polymer real-time monitoring system using a quantum cascade laser molecular spectrometer. It can detect leaked fluorine-containing organic molecules in real-time without any high temperature conversion process.
Applications & Benefits
This lightweight, instant, and accurate analysis system can be deployed in large numbers to conduct molecular pollutant monitoring for an entire site. The system trial in major semiconductor companies has shown its effectiveness in reducing losses caused by stoppage of production lines.