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Industrial Technology Research Institute


Capacitive MEMS Pressure Sensor

Technology Overview

Capacitive MEMS Pressure Sensor.
Capacitive MEMS Pressure Sensor.

The capacitive pressure sensor has the characteristics of low energy consumption, miniaturization and high output resolution. By integration the patented structure and fabrication process design and the low noise capacitive readout ASIC, the pressure sensors have the features of intelligent calibration and temperature composation. The pressure sensing range can be customized.

Applications & Benefits

The capacitive pressure sensor have been widely applied in smart phone/tablet, wearable device, car navigation system, tire pressure monitoring, security screening, people tracing etc.