Technology Overview
ITRI’s vibration sensor designed and fabrication through MEMS technology has the characteristics of low noise, high sensitivity, and dust/water/oil resistance (IP68 grade). In practical application, this vibration monitoring solution including the integration of the time/frequency domain signal analysis system and back-end analysis tool can improve the fabrication stability and accuracy and increase the efficiency of equipment.
Applications & Benefits
This technology can apply in the vibration measurement of the equipment such as machine tool/spindle, ball screw, linear guideway, and robots.
Real-time Vibration Signal Interface.
Vibration Sensor Module.