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Industrial Technology Research Institute

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Mask-less Digital Lithography Technology

Technology Overview

Mask-less Digital Lithography Technology.
Mask-less Digital Lithography Technology.

For the diverse demands in the future smart living, ITRI has developed the process integration solution of Digital Lithography Technology (DLT), which also has great advantages in terms of mask-free for cost saving, improvement of process time, and pave the way for new product and trial production.

Applications & Benefits

The establishment of a verification platform for DLT without traditional photomasks is expected to combine the upstream materials and key manufacturing development to reduce R&D risks in the future. In the innovative market, the trend of product development is small-volume, customization and diversification. Therefore, the transformation and upgrading of existing production lines below a 6G line could save the high costs of masks ,and also could promote display/semiconductor packaging in the future. It also could be applied to various smart life applications, such as smart mobility, medical, retail and edutainment.

Mask-less Digital Lithography Technology.
Mask-less Digital Lithography Technology.

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